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| EOS/ESD INFORMATION |
| Metal and Poly Damage: Methods for Investigation | ||
| Look first | Description | Investigate |
| Quantify scope/size of problem |
Is it a sporadic occurrence? Does it happen on a recurring basis? Does it appear to be "batch" related? |
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| Most likely problem areas |
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Didn't find anything. Now what? |
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| ESD Survey |
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| Found something. Now what? | ||
| Address any findings resulting from ESD survey or process review |
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